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This paper lays out the trail onto a closed-loop polishing process of optical elements enabling the application of the optimum polishing time needed. To that aim, an in-process testing method… Click to show full abstract
This paper lays out the trail onto a closed-loop polishing process of optical elements enabling the application of the optimum polishing time needed. To that aim, an in-process testing method for monitoring an inclusive microsurface quality (e.g., comprising surface roughness and scratch-and-dig) within the polishing spot is analyzed, and its applicability to closed-loop polishing for classical loose-abrasive full-aperture polishing as well as for computer-controlled laser polishing is experimentally tested and verified. This enables the determination of the optimum local dwell time resulting in stable and cost-optimized polishing.
Journal Title: Applied optics
Year Published: 2018
Link to full text (if available)
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