LAUSR

A new signal processing is proposed in which the dispersion phase is not subtracted from the detected spectral phase distribution. The linear and bias components in the spectral phase distribution are used to calculate the complex-valued interference signal (CVIS). The simulations verify that the dispersion phase generates an inclination in the measured surface profile along one direction in which the magnitude of the dispersion phase changes linearly. The simulations also show that the position of zero phase nearest the position of amplitude maximum in the CVIS almost does not change due to the bias component, although the random phase noise contained in the interference signal changes the slope of the linear component. Measured surface profiles show that the new signal processing achieves highly accurate measurement by the CVIS.