LAUSR

The optical response of periodically nanotextured layer stacks with dimensions comparable to the wavelength of the incident light can be computed with rigorous Maxwell solvers, such as the finite element method (FEM). Experimentally, such layer stacks are often prepared on glass superstrates with a thickness, which is orders of magnitude larger than the wavelength. For many applications, light in these thick superstrates can be treated incoherently. The front side of thick superstrate is located far away from the computational domain of the Maxwell solvers. Nonetheless, it has to be considered in order to achieve accurate results. In this contribution, we discuss how solutions of rigorous Maxwell solvers can be corrected for flat front sides of the superstrates with an incoherent a posteriori approach. We test these corrections for hexagonal sinusoidal nanotextured silica-silicon interfaces, which are applied in certain silicon thin-film solar cells. These corrections are determined via a scattering matrix, which contains the full scattering information of the periodically nanotextured structure. A comparison with experimental data reveals that higher-order corrections can predict the measured reflectivity of the samples much better than an often-applied zeroth-order correction.