LAUSR

For a Si-based all-optical spatial terahertz modulator (STM), an enhanced modulation efficiency under low illumination density would be of great significance to exploit the competence of THz technology in real-world applications. We presented here an implementation of such a device by microtexturing and passivating the Si surface, forming a truncated pyramidal array (TPA). This TPA structure with SiO2 passivating coatings not only decreases light reflectance and expands the active area for THz modulation but also remarkably increases the photogenerated carrier lifetime. These 3-fold benefits render Si-TPA superior to bare-Si with respect to the achievable modulation efficiency, especially at low irradiation power. Furthermore such a Si-TPA device is also more applicable than its counterpart that is only passivated by SiO2 nanocoatings, even though the Si-SiO2 has a slightly increased modulation efficiency. These periodically aligned pyramids resembled as a mesa array significantly suppress the lateral diffusion induced by longer diffusion, resulting in an equivalent resolution of bare-Si. This novel Si-TPA based STM is highly desired for realizing a high-performance THz imager and provides a feasible approach to breaking the trade-off between resolution and modulation efficiency.