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Glass-in-glass infiltration for 3D micro-optical composite components.

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Chalcogenide glass exhibits a wide transmission window in the infrared range, a high refractive index, and nonlinear optical properties; however, due to its poor mechanical properties and low chemical and… Click to show full abstract

Chalcogenide glass exhibits a wide transmission window in the infrared range, a high refractive index, and nonlinear optical properties; however, due to its poor mechanical properties and low chemical and environmental stability, producing three-dimensional microstructures of chalcogenide glass remains a challenge. Here, we combine the fabrication of arbitrarily shaped three-dimensional cavities within fused silica molds by means of femtosecond laser-assisted chemical etching with the pressure-assisted infiltration of a chalcogenide glass into the resulting carved silica mold structures. This process enables the fabrication of 3D, geometrically complex, chalcogenide-silica micro-glass composites. The resulting products feature a high refractive index contrast that enables total-internal-reflection guiding and an optical quality roughness level suited for applications in the infrared.

Keywords: glass infiltration; glass glass; infiltration micro; infiltration; glass; chalcogenide glass

Journal Title: Optics express
Year Published: 2022

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