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Compact vertical grating coupler with an achromatic in-plane metalens on a 220-nm silicon-on-insulator platform.

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We proposed a new type of vertical grating couplers (VGCs) with a compact footprint on the 220-nm silicon-on-insulator platform. The overall size of the device containing the L-shaped coupling grating… Click to show full abstract

We proposed a new type of vertical grating couplers (VGCs) with a compact footprint on the 220-nm silicon-on-insulator platform. The overall size of the device containing the L-shaped coupling grating and the taper with achromatic in-plane metalens is only 45 × 15 µm2, and the measured coupling efficiency at 1550 nm is -5.2 dB with a 1 dB bandwidth of 38 nm, around 1.6 dB higher than the VGC without metalens. The incidence angle mismatch has a 1 dB bandwidth of roughly 4°, whereas the displacement mismatch along the x-/y- axis has a bandwidth of around 3/4 µm. Furthermore, we experimentally show that such a design is compatible with VGCs operating in the S, C, and L bands.

Keywords: insulator platform; plane metalens; vertical grating; 220 silicon; achromatic plane; silicon insulator

Journal Title: Optics express
Year Published: 2022

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