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Mid-spatial-frequency (MSF) errors seriously damages the imaging performance of optical components. Path pattern is an important factor that affects the generation of MSF waviness in polishing. This paper proposes a… Click to show full abstract
Mid-spatial-frequency (MSF) errors seriously damages the imaging performance of optical components. Path pattern is an important factor that affects the generation of MSF waviness in polishing. This paper proposes a versatile pseudo random tree-shaped path (RTSP) generation method imitating the growth rules of tree branch in nature, which can efficiently generate continuous, uniformly distributed and multi-directional paths on a specified surface. Furthermore, the effectiveness of RTSP to suppress MSF waviness is verified by numerical simulation and experimental results. Finally, the RTSP is applied to the polishing of Ti-6Al-4V titanium alloy mirror. Results indicate that grinding marks have been significantly removed, while no obvious MSF waviness is introduced.
Journal Title: Optics express
Year Published: 2022
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