Laser stealth dicing can realize material separation with negligible surface damage, but severe aberrations in thick materials degrade processing quality. This Letter presents a nonlinear point-to-point transformation method combined with… Click to show full abstract
Laser stealth dicing can realize material separation with negligible surface damage, but severe aberrations in thick materials degrade processing quality. This Letter presents a nonlinear point-to-point transformation method combined with spherical aberration compensation to achieve aberration-free axial multi-focus beams. The focus peak intensity increases 7 times at a depth of 0.5 mm after spherical aberration compensation, and reaches 44 times at 3.5 mm. Spherical aberration compensation experiments showed that the width of the heat-affected zone remains almost unchanged at different depths inside the glass, and stealth dicing experiments for 1-mm-thick glass demonstrated that aberration-free 1-focus, 2-foci, and 3-foci stealth dicing can be successfully realized.
               
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