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Standard surface specifications for mid-spatial frequency (MSF) errors do not capture complex surface topography and often lose critical information by making simplifying assumptions about surface distribution and statistics. As a… Click to show full abstract
Standard surface specifications for mid-spatial frequency (MSF) errors do not capture complex surface topography and often lose critical information by making simplifying assumptions about surface distribution and statistics. As a result, it is challenging to link surface specifications with optical performance. In this work, we present use of the pupil-difference probability distribution (PDPD) moments to assess general MSF surface errors and show how the PDPD moments relate to the relative modulation.
Journal Title: Optics letters
Year Published: 2023
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