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Single crystalline titanium dioxide thin film in the rutile phase (r-TiO2) is exfoliated from bulk material using a He+-implantation method, and is bonded onto SiO2 substrate to form a heterostructure… Click to show full abstract
Single crystalline titanium dioxide thin film in the rutile phase (r-TiO2) is exfoliated from bulk material using a He+-implantation method, and is bonded onto SiO2 substrate to form a heterostructure using Cu-Sn bonding technology. The exfoliated r-TiO2 thin film was examined to be in good quality, and the exfoliation mechanism of ion-implanted r-TiO2 was analyzed. The obtained r-TiO2 thin film heterostructure with high refractive index contrast has a potential application in the fabrication of high-Q optical microcavities in visible wavelengths, which is useful in integrated photonic devices.
Journal Title: Optical Materials Express
Year Published: 2021
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