LAUSR

All-dielectric metamaterials have emerged as a promising platform for low-loss and highly efficient terahertz devices. However, existing fabrication methods have difficulty in achieving a good balance between precision and cost. Here, inspired by the nano-template-assisted self-assembly method, we develop a micro-template-assisted self-assembly (MTAS) method to prepare large-scale, high-precision, and flexible ceramic microsphere all-dielectric metamaterials with an area exceeding 900  cm×900  cm. Free from organic solvents, vacuum, and complex equipment, the MTAS method ensures low-cost and environmentally friendly fabrication. The ceramic microsphere resonators can be readily assembled into nearly arbitrary arrangements and complex aggregates, such as dimers, trimers, quadrumers, and chains. Finally, using the heat-shrinkable substrate and dipole coupling effect, a broadband reflector with a bandwidth of 0.15 THz and a reflection of up to 95% is demonstrated. This work provides a versatile and powerful platform for terahertz all-dielectric metamaterials, with potential to be applied in a wide variety of high-efficiency terahertz devices.