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Vibration Measurement and Suppression for Laser Galvanometers Using a Micro-electromechanical System-based Accelerometer

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1Department of Mechanical and Mechatronics Systems Research Labs., Industrial Technology Research Institute (ITRI), 195, Sec. 4, Chung Hsing Road, Chutung, Hsinchu 31040, Taiwan 2Department of Automatic Control Engineering, Feng Chia… Click to show full abstract

1Department of Mechanical and Mechatronics Systems Research Labs., Industrial Technology Research Institute (ITRI), 195, Sec. 4, Chung Hsing Road, Chutung, Hsinchu 31040, Taiwan 2Department of Automatic Control Engineering, Feng Chia University (FCU), No. 100, Wenhwa Road, Seatwen, Taichung 40724, Taiwan 3Department of Mechanical Engineering, National Taiwan University (NTU), No. 1, Sec. 4, Roosevelt Road, Taipei 10617, Taiwan

Keywords: using micro; vibration measurement; galvanometers using; laser galvanometers; suppression laser; measurement suppression

Journal Title: Sensors and Materials
Year Published: 2018

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