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Shear horizontal (SH) surface acoustic wave (SAW) sensors formed by combining (100) AlN films with a diamond substrate have been developed in this research. The propagation characteristics of SAW in… Click to show full abstract
Shear horizontal (SH) surface acoustic wave (SAW) sensors formed by combining (100) AlN films with a diamond substrate have been developed in this research. The propagation characteristics of SAW in four composite structures according to the positions of interdigital transducer (IDT) electrodes and/or thin metal films were investigated theoretically. Those composite SAW substrates exhibited excellent SH SAW properties and have the potential for further application in biological and liquid SAW sensors.
Keywords:
composite acoustic;
acoustic materials;
high shear;
materials aln;
velocity composite;
shear velocity
Journal Title: Sensors and Materials
Year Published: 2019
Link to full text (if available)
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Journal Title: Sensors and Materials
Year Published: 2019
Link to full text (if available)
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recommendations!