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Impact of Active Surface Area on Performance and Reliability of Tri-gate FinFET

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1Department of Electronic Engineering, National Kaohsiung Normal University, No. 62, Shenjhong Rd., Yanchao District, Kaohsiung 824, Taiwan 2Department of Electrical Engineering, National University of Kaohsiung, No. 700, Kaohsiung University Rd.,… Click to show full abstract

1Department of Electronic Engineering, National Kaohsiung Normal University, No. 62, Shenjhong Rd., Yanchao District, Kaohsiung 824, Taiwan 2Department of Electrical Engineering, National University of Kaohsiung, No. 700, Kaohsiung University Rd., Nanzih District, Kaohsiung 811, Taiwan 3National Nano Device Laboratories (NDL), National Applied Research Laboratories, No. 26, Prosperity Road I, Hsinchu Science Park, Hsinchu 300, Taiwan

Keywords: impact active; performance reliability; active surface; reliability tri; area performance; surface area

Journal Title: Sensors and Materials
Year Published: 2019

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