LAUSR

In this paper, the nonlinear dynamics equations of a multi-field coupled orthotropic micro film are presented. The Krylov-Bogoliubov-Mitropolsky (KBM) method is used to solve the equations. The multi-fields coupled nonlinear resonant frequencies of a micro film are analyzed. The effects of Casimir force and nonlinear parameter on nonlinear resonant frequencies and vibration amplitudes are investigated. A resonant film is designed and produced. Based on the principle of electrostatic excitation and capacitance detection, the resonant frequency of the micro film is detected. It illustrates that the Casimir force has an important influence on the resonant micro film frequencies and should be considered with a small initial clearance.