1Micro System Integration Center, Tohoku University, Sendai 980-8577, Japan 2Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan 3Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, Sendai 980-8577, Japan… Click to show full abstract
1Micro System Integration Center, Tohoku University, Sendai 980-8577, Japan 2Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan 3Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, Sendai 980-8577, Japan 4Graduate School of Engineering, Osaka University, Suita 565-0871, Japan 5Department of Mechanical Systems, Tokyo City University, Tokyo 158-8557, Japan 6Fukuda Crystal Laboratory, Sendai 989-3204, Japan
               
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