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A fundamentally new way of fabricating a diffraction grating on a surface of diamond via ion (boron) implantation through a superimposed mask is proposed. It is found that graphitization occurs… Click to show full abstract
A fundamentally new way of fabricating a diffraction grating on a surface of diamond via ion (boron) implantation through a superimposed mask is proposed. It is found that graphitization occurs during ion irradiation in unmasked areas in the near-surface region. This graphitization results in the swelling of the surface layer and the formation of a phase periodic structure.
Keywords:
diffraction grating;
ion;
diamond diffraction;
implantation;
via ion
Journal Title: Bulletin of the Russian Academy of Sciences: Physics
Year Published: 2018
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Journal Title: Bulletin of the Russian Academy of Sciences: Physics
Year Published: 2018
Link to full text (if available)
Share on Social Media: Sign Up to like & get
recommendations!