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Automatic control, monitoring, and diagnostic systems are essential to technological progress and the improvement of machine-tool design. In turn, such systems rely on sensors, which collect information regarding mechanical quantities.… Click to show full abstract
Automatic control, monitoring, and diagnostic systems are essential to technological progress and the improvement of machine-tool design. In turn, such systems rely on sensors, which collect information regarding mechanical quantities. Such sensors are also subject to the destabilizing physical factors that accompany machine-tool operation. In the present work, a diamond-based pressure sensor is described, and an appropriate manufacturing technology is outlined. Capacitive pressure sensors with a diamond membrane are produced and tested. The sensor characteristics are as follows: capacitance 8 pF; sensitivity 0.38 pF/kPa.
Journal Title: Russian Engineering Research
Year Published: 2017
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