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Laser Technologies in Micro-Optics. Part 2. Fabrication of Elements with a Three-Dimensional Profile

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Recent research in the field of formation of a 3D profile of optical elements with the use of direct laser writing at various wavelengths and photolithographic technologies on the basis… Click to show full abstract

Recent research in the field of formation of a 3D profile of optical elements with the use of direct laser writing at various wavelengths and photolithographic technologies on the basis of photomasks fabricated by means of laser writing is reviewed. Typical characteristics of the relief, as well as advantages and drawbacks of the above-mentioned methods are considered.

Keywords: optics part; laser; micro optics; technologies micro; optics; laser technologies

Journal Title: Optoelectronics, Instrumentation and Data Processing
Year Published: 2018

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