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A mirror-based Schwarzschild microscope with a wide spectrum and a long working distance was investigated to perform precise assemblage of detectors. We employed a gradient square method to construct the… Click to show full abstract
A mirror-based Schwarzschild microscope with a wide spectrum and a long working distance was investigated to perform precise assemblage of detectors. We employed a gradient square method to construct the evaluation function for realizing accurate quantitative analysis of image defocusing. By imaging a resolution target that corresponded to 228 line pairs per mm, the validity and imaging ability of the system was proven. The results of repeated focusing tests yielded a standard deviation of 0.75 μm, which indicated high performance accuracy for the focusing system. The proposed system has potential applications in industrial inspection and focusing detection.
Journal Title: Applied Sciences
Year Published: 2020
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