LAUSR

In this paper, a silicon-based terahertz wideband filter was designed using rigorous couple wave theory to achieve high diffraction efficiency and wideband filtering performance. The optimal parameters, such as filter period, duty ratio, and groove depth, are given. The design value and tolerance analysis were carried out to obtain the allowable deviation range of each structural parameter of the filter. The device was fabricated and tested for performance. The experimental results were consistent with the design results, proving the feasibility of the design method and can be applied in terahertz, communication, imaging, and other fields.