LAUSR

Mo2N films were synthesized using the reactive magnetron sputtering system in a mixture of argon and nitrogen, and the tribological properties were investigated at different testing temperatures against an Al2O3 counterpart. The relative intensity ratio (RIR) method was used to calculate the weight fraction of the tribo-film (MoO3) on the wear tracks of the films. The results showed that the average friction coefficient first increased from 0.30 at 25 °C to 0.53 at 200 °C, and then decreased to 0.29 at 550 °C, while the wear rate decreased from 2.1 × 10−6 mm3/Nmm at 25 °C to 5.3 × 10−7 mm3/Nmm at 200 °C and then increased to 3.1 × 10−5 mm3/Nmm at 550 °C. The weight fraction of tribo-film was mainly attributed to changes in the average friction coefficient and the wear rate. Besides this, the relative humidity also influenced the tribological properties at 25–200 °C.