LAUSR

Molecular electronic sensors of motion parameters use miniature electrochemical cells as a sensitive element, in which the interelectrode current is sensitive to external mechanical influences. New approaches for creating conversion elements are based on precision methods of micromachining materials. The use of new technologies has opened up the possibility of creating sensitive elements with configurations that have not been previously studied, and for which there is no clear understanding of the regularities that determine the output parameters depending on the geometry of the conversion elements. This work studies the influence of the dielectric coating on the surface of the cathodes on the conversion coefficient. The transforming structure has been made from three plates. The outer plates were an anode–cathode electrode pair. The middle plate served as a separator between the pairs of electrodes. It was found that an insulating layer on the side of the cathode facing away from the adjacent anode allows the conversion factor to be doubled. This result is applicable for a wide class of conversion elements made with microelectronic technologies, as well as structures made of mesh electrodes.