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In order to develop a high-resolution piezoelectric walking actuator with a long stroke for the wafer probe station, this work presents a design of a piezoelectric walking actuator with two… Click to show full abstract
In order to develop a high-resolution piezoelectric walking actuator with a long stroke for the wafer probe station, this work presents a design of a piezoelectric walking actuator with two auxiliary clamping feet elastically attached to major clamping feet. Its construction was introduced and its operating principle was analyzed. Structure design details were discussed and a prototype was proposed. The prototype was fabricated and tested. The experimental results show that the proposed actuator can operate stably along a 20 mm guider. The proposed design is suitable for precision motion control applications.
Journal Title: Micromachines
Year Published: 2022
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