LAUSR

This paper presents the vibration response analysis and optimal structural design of a microgripper driven by linear ultrasonic motors (LUMs) dedicated to improving end-point positioning accuracy. Based on structural vibration theory, a parametric vibration response model of the microgripper finger was established, and the relative sensitivities of the structural and material parameters that affect the vibration amplitude of the fingertip were calculated within the structural and material constraints. Then, according to the sensitivity calculation results, a multidimensional constrained nonlinear optimization model was constructed to suppress the vibration of the end-effector. The improved internal penalty function method combined with Newton iteration was adopted to obtain the optimal structural parameters. Finally, the vibration experimental results show that the vibration amplitude of the initial microgripper fingertip is 16.31 μm, and the value measured after optimization was 2.49 μm, exhibiting a reduction of 84.7%. Therefore, the proposed optimal design method can effectively restrain the vibration of the microgripper end-effector and improve manipulation stability.