Quantifying free-form surfaces using differential confocal microscopy can be challenging, as it requires balancing accuracy and efficiency. When the axial scanning mechanism involves sloshing and the measured surface has a… Click to show full abstract
Quantifying free-form surfaces using differential confocal microscopy can be challenging, as it requires balancing accuracy and efficiency. When the axial scanning mechanism involves sloshing and the measured surface has a finite slope, traditional linear fitting can introduce significant errors. This study introduces a compensation strategy based on Pearson’s correlation coefficient to effectively reduce measurement errors. Additionally, a fast-matching algorithm based on peak clustering was proposed to meet real-time requirements for non-contact probes. To validate the effectiveness of the compensation strategy and matching algorithm, detailed simulations and physical experiments were conducted. The results showed that for a numerical aperture of 0.4 and a depth of slope < 12°, the measurement error was <10 nm, improving the speed of the traditional algorithm system by 83.37%. Furthermore, repeatability and anti-disturbance experiments demonstrated that the proposed compensation strategy is simple, efficient, and robust. Overall, the proposed method has significant potential for application in the realization of high-speed measurements of free-form surfaces.
               
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