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In this paper, physical modeling including optical and Casimir forces is adopted in order to analyze a nano-opto-mechanical actuator based on silicon-on-insulator suspended slot waveguides. Numerical simulations based on the… Click to show full abstract
In this paper, physical modeling including optical and Casimir forces is adopted in order to analyze a nano-opto-mechanical actuator based on silicon-on-insulator suspended slot waveguides. Numerical simulations based on the finite element method and systematic design rules are presented. Moreover, parametric investigations on slot waveguide sizes and optical properties are presented, and their influence on the actuator’s features are discussed.
Keywords:
opto mechanical;
actuator based;
nano opto;
suspended slot;
mechanical actuator;
actuator
Journal Title: Photonics
Year Published: 2017
Link to full text (if available)
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Journal Title: Photonics
Year Published: 2017
Link to full text (if available)
Share on Social Media: Sign Up to like & get
recommendations!