LAUSR.org creates dashboard-style pages of related content for over 1.5 million academic articles. Sign Up to like articles & get recommendations!

Multidirectional UV lithography via inclined/rotated mirrors for liquid materials

Photo from wikipedia

This paper presents development of an exposure equipment for inclined/rotating lithography with UV curable liquid materials. The proposed equipment is composed of inclined mirrors rotating around exposure spot and shading… Click to show full abstract

This paper presents development of an exposure equipment for inclined/rotating lithography with UV curable liquid materials. The proposed equipment is composed of inclined mirrors rotating around exposure spot and shading plate to prevent direct vertical irradiated UV light. UV light ray is reflected on the mirrors, and irradiate to the spot with inclined angle via rotating. During mirrors rotating, UV curable material located on the exposure spot keeps quiet state. The incident angle of UV light ray is controllable by changing the mirror inclination. We developed an equipment and conducted experiment of fabrication of 3D structure with PEGDA.

Keywords: lithography via; liquid materials; via inclined; multidirectional lithography; lithography; inclined rotated

Journal Title: Applied Physics Express
Year Published: 2020

Link to full text (if available)


Share on Social Media:                               Sign Up to like & get
recommendations!

Related content

More Information              News              Social Media              Video              Recommended



                Click one of the above tabs to view related content.