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This paper presents development of an exposure equipment for inclined/rotating lithography with UV curable liquid materials. The proposed equipment is composed of inclined mirrors rotating around exposure spot and shading… Click to show full abstract
This paper presents development of an exposure equipment for inclined/rotating lithography with UV curable liquid materials. The proposed equipment is composed of inclined mirrors rotating around exposure spot and shading plate to prevent direct vertical irradiated UV light. UV light ray is reflected on the mirrors, and irradiate to the spot with inclined angle via rotating. During mirrors rotating, UV curable material located on the exposure spot keeps quiet state. The incident angle of UV light ray is controllable by changing the mirror inclination. We developed an equipment and conducted experiment of fabrication of 3D structure with PEGDA.
Journal Title: Applied Physics Express
Year Published: 2020
Link to full text (if available)
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