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Fabrication of BIT thick films patterned by proton beam writing

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In this study, we fabricated thick films with polyvinylpyrrolidone (PVP) added to bismuth titanate (Bi4Ti3O12) to form a lead-free ferroelectric material. We examined the direct patterning of these materials by… Click to show full abstract

In this study, we fabricated thick films with polyvinylpyrrolidone (PVP) added to bismuth titanate (Bi4Ti3O12) to form a lead-free ferroelectric material. We examined the direct patterning of these materials by using proton-beam irradiation. When 50% PVP was added to the organic source solution, the c-axis orientation was promoted and cracks were suppressed due to stress relaxation. In addition, a dot and an arbitrary-shape micro-pattern were formed on bismuth-titanate thick film by micromachining using a proton beam.

Keywords: thick films; fabrication bit; bit thick; films patterned; proton beam; beam

Journal Title: Journal of the Korean Physical Society
Year Published: 2017

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