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Significant photoresponsivity enhancement of polycrystalline BaSi2 films formed on heated Si(111) substrates by sputtering

We fabricated approximately 200-nm-thick BaSi2 films on Si(111) substrates at 600 °C. The formation of BaSi2 was demonstrated by X-ray diffraction and Raman spectroscopy. A reduction in the electron concentration… Click to show full abstract

We fabricated approximately 200-nm-thick BaSi2 films on Si(111) substrates at 600 °C. The formation of BaSi2 was demonstrated by X-ray diffraction and Raman spectroscopy. A reduction in the electron concentration (n = 2 × 1016 cm−3) by 3 orders of magnitude compared to that previously reported (n = 7 × 1019 cm−3) and resultant photoresponsivity enhancement by more than two orders of magnitude were achieved. The photoresponsivity increased with the bias voltage V bias applied between the top and bottom electrodes, and reached approximately 0.19 A/W at 2.0 eV, room temperature, and |V bias| = 0.5 V.

Keywords: photoresponsivity; basi2; photoresponsivity enhancement; basi2 films; 111 substrates

Journal Title: Applied Physics Express
Year Published: 2018

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