Step Flow Growth of SrRuO3 Thin Films on Vicinal (001) SrTiO3 Substrates by using RF-Magnetron Sputtering
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DOI: 10.3938/jkps.72.504
Abstract: Epitaxial SrRuO3 thin films were fabricated on (001) SrTiO3 substrates by using radio-frequency (RF) magnetron sputtering. The films were deposited on (001) SrTiO3 substrates with a 0.1°, 0.2°, 0.5° or 1.0° miscut angle. The fabrication… read more here.
Keywords: thin films; srruo3 thin; 001 srtio3; step ... See more keywords