Synthesis of ScAlN thin films on Si (100) substrates at room temperature
Sign Up to like & getrecommendations! Published in 2018 at "Microsystem Technologies"
DOI: 10.1007/s00542-017-3660-x
Abstract: Scandium aluminum nitride alloy (ScAlN) thin films have been synthesized using reactive sputtering of a scandium aluminum alloy (Sc0.40Al0.60) target on Si (100) substrates. We have investigated the effects of two sputtering control factors, namely… read more here.
Keywords: thin films; synthesis scaln; films 100; scaln thin ... See more keywords
Influence of Surface Structures on Quality of CdTe(100) Thin Films Grown on GaAs(100) Substrates
Sign Up to like & getrecommendations! Published in 2018 at "Chinese Physics Letters"
DOI: 10.1088/0256-307x/35/8/086801
Abstract: We report the epitaxial growth of single-crystalline CdTe(100) thin films on GaAs(100) substrates using molecular beam epitaxy. By controlling the substrate pre-heated temperature with adjustable Te flux, three different reconstructed surfaces are realized, and their… read more here.
Keywords: thin films; 100 thin; gaas 100; cdte 100 ... See more keywords