Processing of GaN/Si(111) Epitaxial Structures for MEMS Applications
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DOI: 10.1134/s1063782618160297
Abstract: Two different approaches for the etching of the gallium nitride epitaxial layers grown on Si(111) substrates by plasma-assisted molecular beam epitaxy have been elaborated. It is demonstrated that anisotropic etch profiles can be achieved by… read more here.
Keywords: epitaxial structures; 111 epitaxial; chemical etching; structures mems ... See more keywords
Direct Growth and Electrical Properties of YH2 (111) Epitaxial Thin Films on CaF2 (111) and (001) Substrates by Reactive Magnetron Sputtering
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DOI: 10.1246/cl.200420
Abstract: YH2 (111) epitaxial thin films with two and four rotational crystal domains were directly grown both on CaF2 (111) and (001) substrates, respectively, at various growth temperature by reactive magn... read more here.
Keywords: thin films; 111 epitaxial; caf2 111; 111 001 ... See more keywords