Comment on “A study on improvement of discharge characteristic by using a transformer in a capacitively coupled plasma” [Phys. Plasmas 22, 123504 (2015)]
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DOI: 10.1063/5.0037685
Abstract: In the paper [Y.C. Kim et al., Phys. Plasmas 22, 123504 (2015)], the plasma density in radio frequency (RF) capacitively coupled plasma was increased by introducing a step-down ferrite-core transformer into a conventional type-T impedance… read more here.
Keywords: plasmas 123504; coupled plasma; 123504 2015; capacitively coupled ... See more keywords