Sign Up to like & get
recommendations!
2
Published in 2022 at "Micromachines"
DOI: 10.3390/mi13020202
Abstract: To obtain a high-performance surface acoustic wave (SAW) gyroscope substrate, the propagation characteristics and gyroscopic effect of Rayleigh waves in a 128°Y–X LiNbO3/SiO2/Si (LNOI) functional substrate were investigated with a three-dimensional finite element method. The…
read more here.
Keywords:
lnoi substrate;
128 linbo3;
surface acoustic;
substrate ... See more keywords
Sign Up to like & get
recommendations!
2
Published in 2022 at "Nanomaterials"
DOI: 10.3390/nano12122109
Abstract: The seeking of resonator with high Q and low insertion loss is attractive for critical sensing scenes based on the surface acoustic wave (SAW). In this work, 128° YX LiNbO3-based SAW resonators were utilized to…
read more here.
Keywords:
structural parameters;
parameters performance;
128 linbo3;
influence structural ... See more keywords