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Published in 2018 at "Silicon"
DOI: 10.1007/s12633-018-9882-4
Abstract: Effect of swift heavy ions (SHI) on low-k SiO2 thin films has been investigated. SiO2 thin films were deposited on pre-cleaned p-Si substrate by using sol-gel spin coating technique. Further, deposited films were annealed at…
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Keywords:
200 mev;
thin films;
sio2 thin;
fluence ... See more keywords
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1
Published in 2019 at "Indian Journal of Physics"
DOI: 10.1007/s12648-019-01427-5
Abstract: Swift Heavy Ion (SHI) beam irradiation has been used as an experimental technique to modify the material properties through the interaction of the ion beam with the target material. In this work, the properties of…
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Keywords:
ag15 ion;
thin films;
ion;
mev ag15 ... See more keywords
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Published in 2018 at "Materials Research Express"
DOI: 10.1088/2053-1591/aaed1d
Abstract: ZnO single crystal materials irradiated with 200 MeV energy 86Kr17+ ions have been analyzed by a series of theoretical calculations, Raman spectroscopy and TEM tests, etc. After irradiation by 200 MeV 86Kr17+ ions, two broad…
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Keywords:
200 mev;
zno single;
single crystal;
86kr17 ions ... See more keywords