Visible-light silicon nitride waveguide devices and implantable neurophotonic probes on thinned 200 mm silicon wafers.
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DOI: 10.1364/oe.27.037400
Abstract: We present passive, visible light silicon nitride waveguides fabricated on ≈ 100 µm thick 200 mm silicon wafers using deep ultraviolet lithography. The best-case propagation losses of single-mode waveguides were ≤ 2.8 dB/cm and ≤… read more here.
Keywords: silicon nitride; 200 silicon; visible light; silicon wafers ... See more keywords