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Published in 2020 at "Measurement Science and Technology"
DOI: 10.1088/1361-6501/ab7359
Abstract: The absolute length of a single-crystal silicon gauge block was measured by interferometry in the temperature range between 285 K and 320 K and at different air pressures from atmospheric conditions down to 10-5 hPa.…
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Keywords:
thermal expansion;
single crystal;
crystal silicon;
285 320 ... See more keywords