Temperature dependent 29Si incorporation during deposition of highly enriched 28Si films.
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DOI: 10.1103/physrevmaterials.1.064603
Abstract: In this study, we examine the mechanisms leading to 29Si incorporation into highly enriched 28Si films deposited by hyperthermal ion beams at elevated temperatures in the dilute presence of natural abundance silane (SiH4) gas. Enriched… read more here.
Keywords: 29si incorporation; 28si films; highly enriched; incorporation ... See more keywords