Optical and electronic properties of (Al Ga1−)2O3/Al2O3 (x>0.4) films grown by magnetron sputtering
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DOI: 10.1016/j.jallcom.2021.158765
Abstract: Abstract Systematic investigations of the optical and electronic properties are reported for ultrathin (AlxGa1-x)2O3/Al2O3 films with higher Al contents x (> 0.4) prepared by magnetron sputtering method. The X-ray diffraction results revealed the films were… read more here.
Keywords: alxga1 2o3; optical electronic; 2o3 al2o3; electronic properties ... See more keywords