Heteroepitaxial growth of ε-(AlxGa1−x)2O3 alloy films on c-plane AlN templates by mist chemical vapor deposition
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DOI: 10.1063/1.5021296
Abstract: In this study, e-(AlxGa1−x)2O3 alloy films were grown on c-plane AlN templates by mist chemical vapor deposition. The Al content of two samples was determined by Rutherford backscattering analysis. The lattice constant of the e-(AlxGa1−x)2O3… read more here.
Keywords: alxga1 2o3; plane aln; 2o3 alloy; aln templates ... See more keywords