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Published in 2018 at "Journal of Vacuum Science and Technology"
DOI: 10.1116/1.5045048
Abstract: Pseudobinary V0.5Mo0.5Nx(111) alloys with the B1-NaCl crystal structure are grown on Al2O3(0001) substrates in an ultra-high-vacuum system by reactive magnetron sputter deposition in mixed Ar/N2 atmospheres at temperatures Ts between 100 and 900 °C. Nitrogen-to-metal, N/(V + Mo),…
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Keywords:
900 nitrogen;
5nx 111;
al2o3 0001;
5mo0 5nx ... See more keywords