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Published in 2018 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2017.11.019
Abstract: Abstract This research exhibits the development of a thinner and mechanically stable anodic aluminum oxide (AAO) membrane system by providing Al supporting mesh known as Al textured AAO (AT-AAO) membrane. Accordingly AAO was fabricated on…
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Keywords:
fluid permeation;
mechanically stable;
membrane;
aao membrane ... See more keywords
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Published in 2021 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2021.111589
Abstract: Abstract In order to reduce the time required to prepare a tubular through-hole anodic aluminum oxide (AAO) membrane, this study improved the manufacturing processes using one-step anodization. AAO membranes were first prepared by using 6063…
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Keywords:
tubular hole;
membrane;
aluminum;
aao membrane ... See more keywords