Spatially varying aberration calibration using a pair of matched periodic pinhole array masks.
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DOI: 10.1364/oe.27.000729
Abstract: For advanced imaging systems, e.g., projection systems for optical lithography, spatially varying aberration calibration is of utmost importance to achieve uniform imaging performance over the entire field-of-view (FOV). Here we present an efficient, accurate, and… read more here.
Keywords: aberration; using pair; varying aberration; aberration calibration ... See more keywords