Abrasive size and load effects on the wear of a 19.9% chromium and 2.9% carbon cast iron
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DOI: 10.1016/j.wear.2017.02.008
Abstract: Abstract The effects of applied loads and abrasive sizes on the wear of a 2.9% carbon and 19.9% chromium martensitic white cast iron were investigated. Abrasive wear tests using a pin test on silica and… read more here.
Keywords: carbon; size; cast iron; abrasive size ... See more keywords
Effect of Controlling Abrasive Size in Slurry for Tungsten Contact CMP Process
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DOI: 10.1149/2.0311905jss
Abstract: Tungsten contact chemical mechanical polishing is a critical process in advanced node semiconductor device manufacturing that enables metal interconnection. It is essential for device performance, and any defects caused by the tungsten CMP process have… read more here.
Keywords: slurry; cmp process; abrasive size; tungsten contact ... See more keywords