Absolute flat test using rotated and multi-shifted maps with relative tilt measurement
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DOI: 10.1016/j.optlaseng.2018.10.020
Abstract: Abstract In classical three-flat test, error in reference surface can not be identified fully. What we obtain is only the absolute radial profile instead. In addition, at least three flats with similarly high accuracy are… read more here.
Keywords: using rotated; test; test using; flat test ... See more keywords