Novel nano-scale absolute linear displacement measurement based on grating projection imaging
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DOI: 10.1016/j.measurement.2021.109738
Abstract: Abstract There is urgent demand for new absolute Linear Displacement Measurement (LDM) technology with high resolution and high precision, during the development of high-end numerical control technology. In previous research, we found that displacement measurement… read more here.
Keywords: linear displacement; measurement based; absolute linear; based grating ... See more keywords