Resonant MEMS Accelerometer With CW Laser Excitation
Sign Up to like & getrecommendations! Published in 2020 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2020.3015291
Abstract: A silicon MEMS resonator which forms an optical cavity with its package is self-excited and interrogated with a CW laser beam at telecom wavelengths delivered to the device through optical fiber. Self-oscillation at 68 kHz… read more here.
Keywords: resonant mems; laser excitation; accelerometer laser; mems accelerometer ... See more keywords