Characterization of Three-Mode Combination Internal Resonances In Electrostatically Actuated Flexible-Flexible Microbeams
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DOI: 10.1115/1.4066728
Abstract: Nonlinear intermodal coupling based on internal resonances in MEMS resonators has advanced significantly over the past two decades for various real-world applications. In this study, we demonstrate the existence of various three-mode combination internal resonances… read more here.
Keywords: actuated flexible; mode combination; internal resonances; combination internal ... See more keywords