Articles with "actuated mems" as a keyword



Large-aperture, widely and linearly tunable, electromagnetically actuated MEMS Fabry-Perot filtering chips for longwave infrared spectral imaging.

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Published in 2022 at "Optics express"

DOI: 10.1364/oe.473618

Abstract: Longwave infrared spectral imaging (LWIR-SI) has potential in many important civilian and military fields. However, conventional LWIR-SI systems based on traditional dispersion elements always suffer the problems of high cost, large volume and complicated system… read more here.

Keywords: infrared spectral; mems fpfc; aperture; longwave infrared ... See more keywords